| Item | Parameter |
|---|---|
| Mass Flow Controller Range | 0-5000ml/min, 5000-10000ml/min |
| Flow Accuracy | ≤1.0% |
| Flow Distribution Uncertainty | ≤0.6% |
| Flow Repeatability | ≤0.2% |
| Dilution Factor | ≤50 at 2000-3000ml/min |
| Turndown Ratio | 100:1/200:1 |
| Maximum Ratio | 1000:1/4000:1 |
| Input Pressure | 100Kpa~500Kpa |
| Operating Temperature | 0~50℃ |
| Operating Humidity | 0-90%RH |
| Equipment Pressure Resistance | <1Mpa |
| Working Pressure Difference | 0.05Mpa~0.3Mpa |
| Power Supply | 110VAC~240VAC/50Hz |